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970ϵ��971/972/974��һ��(g��)��ͥ�ĽY(ji��)��(g��u)�o�����ɱ�����ͨ�Â����������Ï�һ��(g��)���Ă�(g��)������-��ꎘO��micropirani™���͉�늼��g(sh��)���Y(ji��)���@Щ���м��g(sh��)�܉�Ĵ��y(c��)��������10-8 Torr.  970 10-8ر�����������w�eС�������V�����ɱ��ͣ�970ϵ��971/972/974����.ͨ�^(gu��)��(sh��)��ͨ�Ż�����һ��(g��)������ģ�M��Ԫ������

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• Single transducer provides a wide measurement

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• The MEMS based MicroPirani sensor

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programmable from 2x10-4 to 1x10-3 Torr)

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• The cold cathode anode module design is

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• All transducers include both analog and

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• MicroPirani is automatically zeroed

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• Mountable in any orientation for ease

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• Simplified interface via a single

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• Three user configurable relays for process

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• Alternate analog output ��nd electrical

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• Can be used with the PDR900 controller

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• RoHS ��nd CE Compliant

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• Analytical equipment (mass spectrometer control)

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• Scanning electron microscopes

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• Coating systems

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• Semiconductor loadlock pressure control

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• General vacuum base pressure measurement

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• Long Lifetime: Cold Cathode Gauges do not require a filament, which simplifies gauge construction, increases reliability ��nd lifetime, ��nd lowers the cost of ownership. An internal guard ring reduces contamination on critical components ��nd isolates leakage current from the measurement.

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• Quick Starting: The field emission starter provides faster ��nd more predictable start times.

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• Easy Access Magnet: Tool-free magnet removal simplifies gauge installation ��nd bakeout.

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• High Accuracy: For applications requiring higher precision, an optional calibrated Series 500 CCG provides ±10% accuracy.

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• Digital Display: Displays pressure, USB connectivity, RS-485 address, remaining lifetime, ��nd self diagnostics status.

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• Status LEDs: Indicate when power is applied to the module, when discharge is achieved, the state of the 2 setpoint relays, ��nd if maintenance is suggested at the next PM or immediately.

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• Auto On/Off: The gauge can be programmed to turn ON automatically based on an analog voltage input coming from a higher pressure (i.e. Pirani) gauge. The Series 500 CCG can also automatically turn the gauge OFF based on the analog input and/or the pressure reading from the CCG itself.

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• Easy Maintenance: Internal components are easily replaced for quick maintenance.

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• Baffle: Keeps sputtered material from entering your process chamber.

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• Lifetime Indicator: To avoid guesswork, the Series 500 CCG displays the estimated remaining lifetime of the gauge – the point at which accuracy is compromised ��nd gauge maintenance or replacement is recommended.

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• USB Interface: The USB port provides connection to a PC together with an easy-to-use software program to setup, control, view diagnostics status, ��nd display pressure trends. Communications over USB can occur while the gauge is ON without disrupting normal operation.

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