ZDL3/4�ͣ���(sh��)�@����ꎘO���Ӌ(j��)������ �a(ch��n)Ʒ�f(shu��)����ZDL3����ꎘO����^��� ����M014��ꎘOҎ(gu��)�M(j��n)�Мy(c��)���������ˌ����ԭ�����������c���y(c��)���ϵ�y(t��ng)�ĉ���(qi��ng)�ʷǾ��Ե������y(c��)��������V����(y��ng)��������Ĥ�����ұ��������Ś�ϵ�y(t��ng)���O(sh��)�����՜y(c��)���Ϳ��ơ���Ҏ(gu��)���÷��ſ�ԭ������������ ZDL4�͔�(sh��)�@��ꎘO����^��� �������ˌ����ԭ�����������c���y(c��)���ϵ�y(t��ng)�ĉ���(qi��ng)�ʷǾ��Ե����Ԝy(c��)�������һ��ɑ�(y��ng)��������Ĥ�����ұ��������Ś�ϵ�y(t��ng)���O(sh��)�����՜y(c��)���Ϳ�������Ҏ(gu��)���÷��ſ�ʽԭ������������ZDL3�ͺ�ZDL4�ͼ��g(sh��)ָ��(bi��o)�� �y(c��)��������1×10-1pa��1×10-5Pa��ZDL3���y(c��)����������ż���֣�1×10-1pa��1×10-5Pa��ZDL4����Ҏ(gu��)�����Դ��3��3.3KV ӛ�ݔ����0��+10V ���������l�����h(hu��n)���ضȣ�0��+40��������(du��)��ȣ�������75���Դ��AC220V±10�� 50Hz�������h(hu��n)�����o(w��)��(qi��ng)�ҵęC(j��)е���(d��ng)�ͷ������w�e������119×320×280��mm��4kg 3kg
970ϵ��971/972/974��һ��(g��)��ͥ�ĽY(ji��)��(g��u)�o�����ɱ�����ͨ�Â����������Ï�һ��(g��)���Ă�(g��)������-��ꎘO��micropirani™���͉�늼��g(sh��)���Y(ji��)���@Щ���м��g(sh��)�܉�Ĵ��y(c��)��������10-8 Torr. 970 10-8ر�����������w�eС�������V�����ɱ��ͣ�970ϵ��971/972/974����.ͨ�^(gu��)��(sh��)��ͨ�Ż�����һ��(g��)������ģ�M��Ԫ������
����(gu��)MKS���Ӌ(j��) MKS 970ϵ��971/972/974��ꎘO���Ӌ(j��)��(y��u)��(sh��)��
•С�ɵ��O(sh��)Ӌ(j��)�ṩ��һ�N�o����������Q�����惦(ch��)���߷��خa(ch��n)
• Single transducer provides a wide measurement
•�������ṩ��һ��(g��)�V���Ĝy(c��)�����10-8ر�ķ���(972B ��nd 974B models),��972b��974bģ�ͣ�����������(g��)������Ҫ
• The MEMS based MicroPirani sensor
•����MEMS��micropirani������ 972B 974B ��972b��974b���S�͵���܇(ch��) (user��ꎘO���_(k��i)���������Ñ�
programmable from 2x10-4 to 1x10-3 Torr)
�ɾ��̏�2x10-4��1×10 - 3����������߿ɿ���
• The cold cathode anode module design is
•��ꎘO�(y��ng)�Oģ�K���O(sh��)Ӌ(j��)�Ñ��ɜp��ͣ�C(j��)�r(sh��)�g�����ⲿ�������M(f��i)��
• All transducers include both analog and
•���Ђ���������ģ�M���͞���ڔ�(sh��)��ͨ��operation����
• MicroPirani is automatically zeroed
•micropirani�Ԅ�(d��ng)�{(di��o)�����ѭ�h(hu��n)���^(gu��)��������� (972B ��nd 974B models)���ȣ�972b��974bģ�ͣ�
• Mountable in any orientation for ease
•���b���κη�������O(sh��)Ӌ(j��)�е��`��ʹ��
• Simplified interface via a single
•��(ji��n)���ӿ�ͨ�^(gu��)һ��(g��)��һ��ƽ����ģ�Mݔ�����Y(ji��)�φ�(g��)�������Ĝy(c��)��
• Three user configurable relays for process
•���Ñ������õ��^������^(gu��)��control����
• Alternate analog output ��nd electrical
•�����ģ�Mݔ��늿������B��������(y��ng)�̵ăx���ͷ�����������(j��)
• Can be used with the PDR900 controller
•������pdr900������for easy set up�����O(sh��)��
• RoHS ��nd CE Compliant
•CE��ROHS��(bi��o)��(zh��n)
����(gu��)MKS���Ӌ(j��) MKS 970ϵ��971/972/974��ꎘO���Ӌ(j��)��(y��ng)�ã�
970ϵ�Ђ������Ǿo�������ͳɱ��Ľ�Q�������Ñ�(du��)��՜y(c��)�������ڴ�≺������10-8ر��ԓϵ�е�С�ߴ�970��(g��)��������ʹ�����������ϵ�y(t��ng)������ϣ���p�����EʹС�ͻ�����(y��ng)�ð�����
• Analytical equipment (mass spectrometer control)
•�����O(sh��)�䣨�|(zh��)�V�x���ƣ�
• Scanning electron microscopes
•��������@�R
• Coating systems
•Ϳ��ϵ�y(t��ng)
• Semiconductor loadlock pressure control
•�댧(d��o)�w��ؓ(f��)�d��������
• General vacuum base pressure measurement
•һ����Չ����y(c��)��
����(gu��)Granville-Phillips���Ӌ(j��) GP 500ϵ����ꎘO���Ӌ(j��)�Y(ji��)�ϸ߾��Ȍ�(du��)������(qi��ng)Ƥ����Ӌ(j��)����ṩ��һ��(g��)�o�����������ɿ�������՜y(c��)���Ĵ�10-4ر�Ĺ�(ji��)�s�ɱ��Ľ�Q������35�����ϳɹ��ĬF(xi��n)��(ch��ng)���b��ԓ��(du��)���y(c��)ƫ�x���ѳɞ�һ�N�ИI(y��)��(bi��o)��(zh��n)������һ�N��(d��)�صğጧ(d��o)��׃�����ϵĉ����y(c��)���ǻ��ڏĂ�������(d��o)���ğ�pʧ������ͬ�ڂ��y(t��ng)�ğ��ż��Ƥ����Ӌ(j��)��ֻʹ�Ì�(d��o)늵ğ�pʧ�����ڌ�(du��)���y(c��)ƫ�x�����������^�߉����µČ�(du��)����pʧ���@����Ĝ�(zh��n)�_��������(du��)���Ŀ��؏�(f��)�Ĝy(c��)������(du��)���y(c��)ƫ�x����ʹ�ý�������̎����ǧ���f(w��n)�����������ʹ������(du��)�S����Ց�(y��ng)��һ��(g��)���ǵ��x����ģ�K���ṩģ�Mݔ����RS-485�ӿڣ���DeviceNet™�ӿ���
����(gu��)Granville-Phillips���Ӌ(j��) GP 500ϵ����ꎘO���Ӌ(j��)��(y��u)��(sh��)��
l ��10-10��10-2ر•���ĉ����y(c��)������
l �Ϊ�(d��)У��(zh��n)��Ҏ(gu��)�ṩ��ߵľ���
l �@ʾ��������B(t��i)
l RS-485ͨ�Žӿ��c�����P(gu��n)�]��B(t��i)��ݔ��ģ�M��̖(h��o)�_(k��i)ʼ�c(di��n)����б��
l USB�ӿڿ�����У�(y��n)�x�ĬF(xi��n)����M(j��n)���O(sh��)��
l ��Ҏ(gu��)���O(sh��)Ӌ(j��)�p�����P(gu��n)�IԪ�����ĉ������ӵ���Ⱦ
l ����ָʾ���@ʾ�ڱ���Ҫ�S��
l ���ڲ�ж����ӺʹŽM��ʹ�濾�����b����
l ����2��(g��)�ɾ����O(sh��)���^���
����(gu��)Granville-Phillips���Ӌ(j��) GP 500ϵ����ꎘO���Ӌ(j��)
•�y(c��)�������������S���ϵ�y(t��ng)�������M(j��n)���B�m(x��)�O(ji��n)�y(c��)����1x10-10��1x10-2�С�
• Long Lifetime: Cold Cathode Gauges do not require a filament, which simplifies gauge construction, increases reliability ��nd lifetime, ��nd lowers the cost of ownership. An internal guard ring reduces contamination on critical components ��nd isolates leakage current from the measurement.
•�����L(zh��ng)����ꎘOҎ(gu��)����Ҫ���z���Ķ���(ji��n)����Ҏ(gu��)�����O(sh��)����߿ɿ��Ժ͉����������͓��гɱ���һ��(g��)��(n��i)���ı��o(h��)�h(hu��n)���p����Ⱦ���x�P(gu��n)�IԪ����©����Ĝy(c��)����
• Quick Starting: The field emission starter provides faster ��nd more predictable start times.
•���ن���(d��ng)����(ch��ng)�l(f��)������(d��ng)�C(j��)�ṩ��������A(y��)�y(c��)���_(k��i)ʼ�r(sh��)�g��
• Easy Access Magnet: Tool-free magnet removal simplifies gauge installation ��nd bakeout.
•�����L��(w��n)�Ĵ��F��������ų���(ji��n)���˃x�����b�ͺ濾��
• High Accuracy: For applications requiring higher precision, an optional calibrated Series 500 CCG provides ±10% accuracy.
•�߾��ȣ�����Ҫ���^�ߵđ�(y��ng)�ã�һ��(g��)���x��У��(zh��n)500ϵ���ṩ10%�ľ���±CCG��
• Digital Display: Displays pressure, USB connectivity, RS-485 address, remaining lifetime, ��nd self diagnostics status.
•��(sh��)���@ʾ���@ʾ������USB�B����RS-485ͨӍ��ʣ�������������\���B(t��i)��
• Status LEDs: Indicate when power is applied to the module, when discharge is achieved, the state of the 2 setpoint relays, ��nd if maintenance is suggested at the next PM or immediately.
•��B(t��i)LED��ָʾ��(d��ng)�Դ��(y��ng)�õ�ģ�K����(d��ng)�����_(d��)���O(sh��)��ֵ��2���^����Ġ�B(t��i)������S���ǽ��h����һ��(g��)�c(di��n)��������
• Auto On/Off: The gauge can be programmed to turn ON automatically based on an analog voltage input coming from a higher pressure (i.e. Pirani) gauge. The Series 500 CCG can also automatically turn the gauge OFF based on the analog input and/or the pressure reading from the CCG itself.
•�Ԅ�(d��ng)�_(k��i)/�P(gu��n)�������Ա����̞錢����һ��(g��)ģ�M늉�ݔ���(l��i)����һ��(g��)���ߵĉ����Ԅ�(d��ng)����Ƥ���ᣩӋ(j��)��500ϵ��CCG߀�����Ԅ�(d��ng)�P(gu��n)�]�y(c��)��?j��)x�Ļ��A(ch��)����ģ�Mݔ���/���CCG�����ĉ����x��(sh��)��
• Easy Maintenance: Internal components are easily replaced for quick maintenance.
•�S���㣺��(n��i)���������ڸ��Q���پS����
• Baffle: Keeps sputtered material from entering your process chamber.
•���壺���֞R������M(j��n)������̎������
• Lifetime Indicator: To avoid guesswork, the Series 500 CCG displays the estimated remaining lifetime of the gauge – the point at which accuracy is compromised ��nd gauge maintenance or replacement is recommended.
•����������y(c��)��500ϵ��CCG�@ʾ��Ӌ(j��)��ʣ��������Ӌ(j��)–�c(di��n)�����ܵ��p�����x���S����Q�Ľ��h��
• USB Interface: The USB port provides connection to a PC together with an easy-to-use software program to setup, control, view diagnostics status, ��nd display pressure trends. Communications over USB can occur while the gauge is ON without disrupting normal operation.
•USB�ӿڣ�USB�˿��ṩ���B�ӵ�PC��һ��(g��)����ʹ�õ�ܛ�������O(sh��)�����������鿴�\���B(t��i)�����@ʾ������څ��(sh��)����USBͨ����Ӌ(j��)���ڲ��Ɖ����������l(f��)����
�ɶ�����Ƽ�����˾��������Ď�(k��)������؛�ڶ����ڃr(ji��)�����кܴ�(y��u)��(sh��)����һ֧���N(xi��o)�������g(sh��)֧�����ۺ����(w��)��һ�w�ă�(y��u)��F(tu��n)�(du��)�����ṩ�N�ķ���(w��)���gӭ���4008-567-377��l(f��)�]����siyangchina@163.com��ȡ�������dȤ�Įa(ch��n)Ʒ�Y����
����Ԕ��(x��)����(sh��)Ո(q��ng)?ji��n)L��(w��n)���ɶ�����Ƽ�����˾���W(w��ng)վ:
www.4-ocean.com